sar150单轴微机械陀螺，其零偏稳定性为50°/hr。 sar150 contains a butterflygyrotm mems die and a bicmos mixed mode asic, housed in a rigid cus-tom ceramic lcc package to accommodate for ei-ther horizontal or vertical mount. the sensor is fac-tory-calibrated and compensated for temperature ef-fects to provide high-accuracy digital output over a broad temperature range. perfect tuning of the excitation and detection fre-quency as well as perfect mechanical and electrical balancing the dual masses result in very low sensitiv-ity to vibration and shock. by utilizing a unique sealed cavity technology, the vibrating masses are contained within the low- pressure hermetic environment needed for creating low dynamic damping and high q-factors, without any degradation over the lifetime of the device what-ever tough environmental conditions. sar150 is a product with high bias and scale factor stability, designed for demanding applications in mil/aerospace and industrial markets. the sensor is highly rugged, consuming as little power as 50 mw, offering the best value of any gyro product in its class of performance. the in-run bias stability of sar150 is 50 °/h. spi interface of the sensor enables easy and effec-tive communication to the application. angular rate data output is 12-bit 2’s compliment, at a maximum rate of 2000 samples per second. a number of func-tions are available through the digital spi interface including advanced self diagnostics.